منابع مشابه
Thermal Flow Micro Sensors'
A review is given on sensors fabricated by silicon micromachining technology using the thermal domain for the measurement of fluid flow. Attention is paid especially to performance and geometry of the sensors. Three basic types of thermal jlow sensors are discussed: anemometers, calorimetric flow sensors and time of flight flow sensors. Anemometers may comprise several heaters and temperature s...
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ژورنال
عنوان ژورنال: The Journal of the Society of Chemical Industry, Japan
سال: 1968
ISSN: 0023-2734,2185-0860
DOI: 10.1246/nikkashi1898.71.12_2002